Technical Expertise (Plasma Etch)
- Strong knowledge of plasma etch systems (RF gen, ESC, Wafer backside gas cooling system)
- Understanding theory of plasma creation
- Hands-on chamber full wet clean, lifter pin motor assy replacement / servicing, robot change, slip valve change …..etc
- Strong capability to troubleshoot ultra low particle count and ICPMS.
Equipment Performance & Reliability
- Perform preventive maintenance (PM) and corrective maintenance (CM)
- Troubleshoot equipment failures and minimize downtime
- Ensure machines meet operational and safety standards
- Manage spare parts and critical component tracking
- Balance PM tool time with manufacturing
- May require on-call support for critical situation
Process Support & Optimization
- Support production by ensuring stable processes
- Work closely with process engineers to optimize tool parameters
- Monitor tool performance using SPC (Statistical Process Control)
- Drive improvements in yield and defect reduction
Troubleshooting & Problem Solving
- Conduct root cause analysis (RCA) for equipment and process issues
- Apply structured problem-solving methods (e.g., 8D, Fishbone, FMEA)
- Implement corrective actions and preventive actions (CAPA)
Continuous Improvement
- Lead or participate in productivity and cost-reduction projects
- Improve Mean Time Between Failures (MTBF) and Mean Time To Repair (MTTR)
- Enhance equipment efficiency and automation
Installation & Qualification
- Support new equipment installation, setup, and acceptance (SAT/FAT)
- Perform equipment qualification and process buy-off
- Collaborate with vendors for upgrades and modifications
Documentation & Reporting
- Maintain accurate maintenance records and technical documentation
- Prepare reports on equipment performance, downtime, and improvements
- Update SOPs and work instructions
Safety & Sustainability
- Ensure compliance with fab safety protocols and cleanroom standards
- Handle high-voltage systems, vacuum systems, and hazardous gases safely
- Balance equipment sustainability vs needs
Key Performance Indicators
- Equipment uptime (%)
- OEE
- Yield impact
- PM compliance rate
- FDC trigger rate
Soft Skills
- Strong analytical and problem-solving skills
- Ability to work under pressure in a high-volume manufacturing environment
- Good communication and teamwork
- Proactive and self-driven mindset
- Utilizing goggle office & Gemini AI
